Semi-conductor / Photovoltaics

Acids and alkaline solutions are applied in the production of semi-conductors or solar cells. They and their reaction products partially pass into the gas phase during the production process and thus enter into process waste air. In this field, GBToffers matured and high-performance systems for process and waste air treatment.

• Central gas scrubber
  Cleaning of large volume flows of acidic or basic waste gas from different suction stations in wafer and chip production
• HF-/NOx-Scrubbers
  Emission of nitrous and fluoride-containing gases, which occur in the processes of pickling and etching
• Semiconductor Compact Scrubbers (SCS)
  Suitable for very small volume flows that are highly concentrated and occur in explosive atmospheres. Special application as chamber scrubber behind epitaxy reactors